Aerosol Particle Technology ڰпǿ Ű ȯմϴ.
   
  Title : Enhanced cleaning of photoresist film on a transparent substrate by backward irradiation of a NdYAG laser
  Author : Kim, J.H., Suh, Y.J. and Kim, S.S.
  Journal : Applied Surface Science, Vol.253(4), pp.1843-1848
  Year of Pub. : 2006
  File : Enhanced cleaning of photoresist film on a transparent substrate by backward irradiation of a Nd.YAG laser.pdf (875.6K), Down : 31, 2010-07-23 14:56:46